VERFAHREN ZUR HERSTELLUNG VON KOHLENSTOFFARMEM SILICIUMNITRID

An improved process for preparation of silicon nitride powder having a low carbon content comprises treating silicon nitride powder with an atmosphere containing chlorine gas at temperatures from 600 DEG to 1050 DEG C. and then with an atmosphere containing gaseous oxygen.

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Bibliographische Detailangaben
Hauptverfasser: FRANZ,GERHARD,.DR, SCHOENFELDER,LOTHAR,.DR
Format: Patent
Sprache:ger
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Zusammenfassung:An improved process for preparation of silicon nitride powder having a low carbon content comprises treating silicon nitride powder with an atmosphere containing chlorine gas at temperatures from 600 DEG to 1050 DEG C. and then with an atmosphere containing gaseous oxygen.