Method for producing high-precision thin-film resistors

The invention relates to the field of microelectronics. The aim of the invention is to improve the quality of thin-film circuits. The invention is based on the object of designing a thin-film circuit, which contains thin-film resistors and a configuration of metallisation elements for circuit implem...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HINUEBER,WILFRIED,DR, BRUECKNER,WINFRIED,DR.SC.NAT, BAETHER,KARL-HEINZ,ER.NAT, MOENCH,JENSOLF, LANGE,FELIX,ER.NAT.HABIL
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY RESISTORS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!