VERFAHREN UND VORRICHTUNG ZUM MISCHEN VON GASEN
In an installation for treating workpieces by a glow discharge in a mixture of gases, the gas pressure is detected and valves for the various gases are cyclically and symmetrically opened and closed by amounts relative to the volumetric ratio of the gases.
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | ger |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | In an installation for treating workpieces by a glow discharge in a mixture of gases, the gas pressure is detected and valves for the various gases are cyclically and symmetrically opened and closed by amounts relative to the volumetric ratio of the gases. |
|---|