VERFAHREN ZUR BILDUNG EINER ELEKTRISCH ISOLIERENDEN SCHICHT AUF EINEM SUBSTRAT MIT EINEM METALLMUSTER FUER EINE INTEGRIERTE SCHALTUNG

A method of making inclined sides on a metal pattern which is grown on a substrate by electroplating as a preliminary measure to the coating of the substrate with the metal pattern by an insulating layer. The main deposition of the insulating layer by sputtering is preceded by a sputter-etching step...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JAN KOEL,GERRIT, POSTMA,LAMBERTUS
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDUCTANCES INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MAGNETS PHYSICS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES SEMICONDUCTOR DEVICES STATIC STORES TRANSFORMERS
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