VERFAHREN ZUR BILDUNG EINER ELEKTRISCH ISOLIERENDEN SCHICHT AUF EINEM SUBSTRAT MIT EINEM METALLMUSTER FUER EINE INTEGRIERTE SCHALTUNG

VERFAHREN ZUR BILDUNG EINER ELEKTRISCH ISOLIERENDEN SCHICHT AUF EINEM SUBSTRAT MIT EINEM METALLMUSTER FUER EINE INTEGRIERTE SCHALTUNG

A method of making inclined sides on a metal pattern which is grown on a substrate by electroplating as a preliminary measure to the coating of the substrate with the metal pattern by an insulating layer. The main deposition of the insulating layer by sputtering is preceded by a sputter-etching step...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JAN KOEL,GERRIT, POSTMA,LAMBERTUS
Format: Patent
Sprache:ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDUCTANCES
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
MAGNETS
PHYSICS
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
SEMICONDUCTOR DEVICES
STATIC STORES
TRANSFORMERS
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Beschreibung
Zusammenfassung:A method of making inclined sides on a metal pattern which is grown on a substrate by electroplating as a preliminary measure to the coating of the substrate with the metal pattern by an insulating layer. The main deposition of the insulating layer by sputtering is preceded by a sputter-etching step which transforms the rounded edges of the metal pattern into inclined sides.