DE2733924

A floating piece is provided between a fixed base and a movable plate which are arranged in parallel spaced relationship, the floating piece being engaged with the fixed base for movement only in the X direction and being engaged with the plate for movement only in the Y direction. First counter piezoelectric members capable of expanding or contracting in the X direction in response to an applied voltage and second counter piezoelectric members capable of expanding and contracting in the Y direction in response to an applied voltage are connected to the floating piece. Sliders are disposed at the ends of the piezoelectric members which slide on the base and movable plate, respectively, the sliders being provided with electrically operated attractors which serve to attract and fasten the sliders to the base and plate. By selective application of voltage signals to the piezoelectric members and the attractors, the plate can be made to move simultaneously in orthogonal directions with respect to the base under the guidance of the floating piece.