High vacuum chamber for target irradiation - has feed carriage for frame carrying magazine and swivelling arm with gripper for target

The high vacuum chamber is intended for irradiation of individual targets inserted in a suitable frame. The chamber has a feed device and a setting element which transfers the target across the feed direction into the irradiation position and retracts the same after irradiation into the feed device. The feed device has a carriage transporting a magazine containing the individual frames with the targets, with a swivelling arm having a gripper which, in dependence on the carriage position, selects a respective target and frame for removal from the magazine and for transfer into the irradiation position. The swivelling arm returns the irradiated target back into the magazine. A sensor, located outside the treatment beam cone, measures the radiation portion reflected from the target.