VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES HALBLEITERKOERPERS

VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG EINES HALBLEITERKOERPERS

A method and apparatus for forming a groove in a semiconductor element with at least two junctions between regions of alternating opposite conduction types and different doping concentrations and with the semiconducting region enclosed between the junctions exhibiting a higher resistivity than eithe...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SCHWEITZER,SAMUEL, KUHN,OTTO
Format: Patent
Sprache:ger
Schlagworte:
ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GRINDING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A method and apparatus for forming a groove in a semiconductor element with at least two junctions between regions of alternating opposite conduction types and different doping concentrations and with the semiconducting region enclosed between the junctions exhibiting a higher resistivity than either of the neighboring regions, the lateral surface of the element between the surface edges of the junctions being sloped by means of a groove cut by sand blasting.