Multilayer gallium arsenide semiconductor - for laser diode
Prodn. of a semiconductor diode contg. a series of epitaxially formed layers of n-GaAs - n - GaHAs - GaAs - p - GaHAs - p - GaAs is improved by forming a supernumerary layer, pref. GaAlAs, and finally etching it away, pref. with hydrochloric acid. By this method, the formation of the p - GaAs layer...
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Format: | Patent |
Sprache: | eng ; ger |
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Zusammenfassung: | Prodn. of a semiconductor diode contg. a series of epitaxially formed layers of n-GaAs - n - GaHAs - GaAs - p - GaHAs - p - GaAs is improved by forming a supernumerary layer, pref. GaAlAs, and finally etching it away, pref. with hydrochloric acid. By this method, the formation of the p - GaAs layer which must be very thin (0.005 mm) is facilitated, compared with the conventional method of allowing it to grow thicker and then grinding to the required thickness. |
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