Ohmic contacts for semiconductors - with highly doped silicon layer to prevent contamination
Ohmic contact for semiconductor cpds. of the III-V and IV-IV gps. comprises a layer of highly doped and amorphous Si on the part of the surface of the undoped material for which the contact is required, no enrichment zone being necessary. This type of contact is resistant to relatively high temps. a...
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Zusammenfassung: | Ohmic contact for semiconductor cpds. of the III-V and IV-IV gps. comprises a layer of highly doped and amorphous Si on the part of the surface of the undoped material for which the contact is required, no enrichment zone being necessary. This type of contact is resistant to relatively high temps. and avoids releasing an impurity of the semiconductor material. |
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