DE2203123

A process for the gettering of semi-conductors wherein the semi-conductors are placed between and in contact with solid bodies selected from the group consisting of quartz glass, silicon nitride and boron nitride which are then heated to a gettering temperature preferably between 1,000 DEG C and 1,2...

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Bibliographische Detailangaben
Hauptverfasser: SCHWEITZER, SAMUEL., BIRR, ZIFFERMAYER, GEORG, WETTINGEN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A process for the gettering of semi-conductors wherein the semi-conductors are placed between and in contact with solid bodies selected from the group consisting of quartz glass, silicon nitride and boron nitride which are then heated to a gettering temperature preferably between 1,000 DEG C and 1,200 DEG C. The heating is preferably carried out under a vacuum or in the presence of an inert atmosphere. When boron nitride is used for the solid bodies, the process can serve simultaneously for also producing the desired doping characteristic within the semi-conductor.