Polymer-Elektrolyt-Membran Brennstoffzellensystem in Mikrosystemtechnik

A microsystem polymer electrolyte membrane (PEM) fuel cell is produced by a combination of thin film, microsystem etching and glass/silicon bonding technology. A microsystem PEM fuel cell comprises a complete fuel cell structure which is produced by a thin film process on porous membranes formed in a silicon substrate by a microsystem technology etching process, and which comprises a plasma polymerized membrane, two catalyst metal-doped porous graphite layers and elements for connecting the structure to parallel produced structures, the structure allowing spatially separate and uniform supply of fuel from both sides by means of a glass/silicon bonding technique.