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A probe microscope carries a so-called active anti-vibration table in which a vibration to a anti-vibration table plate by a floor vibration is detected by a shift meter, an acceleration sensor or the like, and a vibration having an opposite phase to that of this vibration is given to the anti-vibra...

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Bibliographische Detailangaben
Hauptverfasser:	FUJINO, NAOHIKO, WAKIYAMA, SHIGERU
Format:	Patent
Sprache:	ger
Schlagworte:	ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MUSICAL INSTRUMENTS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SOUND-PRODUCING DEVICES TESTING
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Beschreibung
Zusammenfassung:	A probe microscope carries a so-called active anti-vibration table in which a vibration to a anti-vibration table plate by a floor vibration is detected by a shift meter, an acceleration sensor or the like, and a vibration having an opposite phase to that of this vibration is given to the anti-vibration table plate, thereby reducing an external vibration component from the floor vibration also in the apparatus installation site having frequencies from a low frequency component to a high frequency component.