Method of optical microscopy with sub-wavelength resolution

The method involves the use of coolant and a near field probe (6). The specimen (1) is placed under vacuum in thermal contact with a cooling element (3), which cools the specimen without direct contact of the specimen surface with a coolant. The temperature of the specimen is set in the range 5-500...

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Hauptverfasser:	LIENAU, CHRISTOPH., 12355 BERLIN, DE, SUEPTITZ, MARKO, 12527 BERLIN, DE, RICHTER, ALEXANDER, 15732 EICHWALDE, DE, BEHME, GERD, 12437 BERLIN, DE, ELSAESSER, THOMAS, DR., 12355 BERLIN, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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creator	LIENAU, CHRISTOPH., 12355 BERLIN, DE SUEPTITZ, MARKO, 12527 BERLIN, DE RICHTER, ALEXANDER, 15732 EICHWALDE, DE BEHME, GERD, 12437 BERLIN, DE ELSAESSER, THOMAS, DR., 12355 BERLIN, DE
description	The method involves the use of coolant and a near field probe (6). The specimen (1) is placed under vacuum in thermal contact with a cooling element (3), which cools the specimen without direct contact of the specimen surface with a coolant. The temperature of the specimen is set in the range 5-500 K using heating and cooling. The temperature controlled specimen is exposed to light. The light transmitted or reflected or emitted by the specimen is detected and evaluated.
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language	eng ; ger
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subjects	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
title	Method of optical microscopy with sub-wavelength resolution
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