Method of optical microscopy with sub-wavelength resolution

The method involves the use of coolant and a near field probe (6). The specimen (1) is placed under vacuum in thermal contact with a cooling element (3), which cools the specimen without direct contact of the specimen surface with a coolant. The temperature of the specimen is set in the range 5-500...

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Bibliographische Detailangaben
Hauptverfasser:	LIENAU, CHRISTOPH., 12355 BERLIN, DE, SUEPTITZ, MARKO, 12527 BERLIN, DE, RICHTER, ALEXANDER, 15732 EICHWALDE, DE, BEHME, GERD, 12437 BERLIN, DE, ELSAESSER, THOMAS, DR., 12355 BERLIN, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	The method involves the use of coolant and a near field probe (6). The specimen (1) is placed under vacuum in thermal contact with a cooling element (3), which cools the specimen without direct contact of the specimen surface with a coolant. The temperature of the specimen is set in the range 5-500 K using heating and cooling. The temperature controlled specimen is exposed to light. The light transmitted or reflected or emitted by the specimen is detected and evaluated.