Device for detecting and influencing deflection of micromechanical mirror arrangements

The device has one or more individual mirrors (1) connected to an enclosing frame (3) by at least two springs. At least one section of the spring has electrical characteristics that vary under deformation or carries an element whose electrical characteristics vary under deformation. The frame carrie...

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Bibliographische Detailangaben
Hauptverfasser:	KURTH, STEFFEN.., 09392 AUERBACH, DE, MARKERT, JOACHIM.., 09119 NITZ, DE, GESNER, THOMAS, DR..HABIL., 09113 NITZ, DE, SCHMIDT, KARSTEN., 09131 NITZ, DE, KAUFMANN, CHRISTIAN.., 09217 BURGSTAEDT, DE, KEHR, KERSTEN., 08267 ZWOTA, DE, RAUCH, MANFRED..HABIL., 09114 NITZ, DE, LOEWE, HEINZ-ULRICH.., 09577 NIEDERWIESA, DE, HAHN, RAMON., 09126 NITZ, DE, DOETZEL, WOLFRAM, DR.., 09127 NITZ, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The device has one or more individual mirrors (1) connected to an enclosing frame (3) by at least two springs. At least one section of the spring has electrical characteristics that vary under deformation or carries an element whose electrical characteristics vary under deformation. The frame carries electrical contact points (4) and components. The variable characteristic element is connected to the components via electrically conducting tracks (5) and forms part of a measurement circuit detecting the mirror deflections or part of a controller.