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In an atomic force microscope probe with an electroconducting spring-mounted stylus and an electroconducting probe point, the spring-mounted stylus is provided with a shielding electrode and an electrically insulating layer is arranged between the shielding electrode and the spring-mounted stylus. E...

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Bibliographische Detailangaben
Hauptverfasser:	OHLSSON, OLAF. DR., 71134 AIDLINGEN, DE, GUENTHER, EWALD. DR., 91074 HERZOGENAURACH, DE, LEUSCHNER, RAINER. DR., 91056 ERLANGEN, DE
Format:	Patent
Sprache:	ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	In an atomic force microscope probe with an electroconducting spring-mounted stylus and an electroconducting probe point, the spring-mounted stylus is provided with a shielding electrode and an electrically insulating layer is arranged between the shielding electrode and the spring-mounted stylus. Electrostatic forces produced during operation may thus be eliminated.