Diamantähnliche Beschichtung

A process is disclosed for generating a wear-resistant, diamond-like coating on a substrate (1), as well as a wearing part provided with such a coating, for example in a textile machine. Although the diamond-like coating is quickly and economically produced, it adheres well to the substrate. A unifo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DURST, GUENTHER, 72664 KOHLBERG, DE, SELLSCHOPP, MICHAEL., 72076 TUEBINGEN, DE, KRALL, STEFAN, 73105 DUERNAU, DE
Format: Patent
Sprache:ger
Schlagworte:
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Beschreibung
Zusammenfassung:A process is disclosed for generating a wear-resistant, diamond-like coating on a substrate (1), as well as a wearing part provided with such a coating, for example in a textile machine. Although the diamond-like coating is quickly and economically produced, it adheres well to the substrate. A uniform quality over the area exposed to wear is obtained with this process, as well as a wearing part provided with this coating. In a plasma-enhanced chemical vapour deposition process of the coating layer from a gaseous atmosphere in a reaction chamber (5), the deposition atmosphere is excited by electromagnetic radiation, and an electric bias voltage is generated between the substrate (1) and at least one ground electrode (6, 51). The disclosed process is characterised in that the substrates (1) are arranged in such a way that as many as possible of the field lines (4) between the substrate and the ground electrodes perpendicularly cross the surface (3) spanned by the arrangement of the substrates or the field lines (4) extend perpendicularly to the spanning surface at the end closest to the spanning surface (3).