Metallisation structure e.g. of liq. crystal device

In a metallisation structure, a first conductive material(14) of indium-tin oxide and a second conductive material (18), pref. of doped silicon are connected by an intermediate body (28) of a conductive material (pref. copper or silver) which forms no oxide with a standard heat of formation in a mor...

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Hauptverfasser: YAMAMOTO, KENJI, MIYAGI, JP, HEBIGUCHI, HIROYUKI, SENDAI, MIYAGI, JP
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HEBIGUCHI, HIROYUKI, SENDAI, MIYAGI, JP
description In a metallisation structure, a first conductive material(14) of indium-tin oxide and a second conductive material (18), pref. of doped silicon are connected by an intermediate body (28) of a conductive material (pref. copper or silver) which forms no oxide with a standard heat of formation in a more negative region than that of SnO2. Also claimed is a liq. crystal device in which an ohmic contact layer (24) of a thin film transistor and an ITO-contg. pixel electrode (14) are connected by a conductive material which forms no oxide with a standard heat of formation in a more negative region than that of SnO2.
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subjects BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
title Metallisation structure e.g. of liq. crystal device
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