Polishing device for upper surface of workpiece

The polishing device has a casting unit (1), a dividing wall (22) dividing the interior of the casing unit into at least two chambers (48,49), a polishing sector (2) in the first chamber, a turntable (3) with polishing cloth (7) on its upper surface, and an upper ring (5) positioned above the turnta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SAITO, HARUMITSU, YOKOHAMA, KANAGAWA, JP, NISHI, TOYOMI, YOKOHAMA, KANAGAWA, JP, TSUJIMURA, MANABU, YOKOHAMA, KANAGAWA, JP, SHIGETA, ATSUSHI, FUJISAWA, KANAGAWA, JP, KOUNO, GISUKE, OITA, JP, KODAMA, SHOICHI, TOKIO/TOKYO, JP, TOGAWA, TETSUJI, FUJISAWA, KANAGAWA, JP, YAJIMA, HIROMI, YOKOHAMA, KANAGAWA, JP, WATASE, MASAKO, YOKOHAMA, KANAGAWA, JP, AOKI, RIICHIRO, TOKIO/TOKYO, JP, MISHIMA, SHIRO, YOKKAICHI, MIE, JP, IMOTO, YUKIO, ZAMA, KANAGAWA, JP, HIMUKAI, KAZUAKI, CHIGASAKI, KANAGAWA, JP
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BASIC ELECTRIC ELEMENTS BLASTING CLEANING CLEANING IN GENERAL DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING HEATING LIGHTING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MECHANICAL ENGINEERING PERFORMING OPERATIONS POLISHING PREVENTION OF FOULING IN GENERAL RANGES SEMICONDUCTOR DEVICES TRANSPORTING VENTILATING WEAPONS
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Beschreibung
Zusammenfassung:	The polishing device has a casting unit (1), a dividing wall (22) dividing the interior of the casing unit into at least two chambers (48,49), a polishing sector (2) in the first chamber, a turntable (3) with polishing cloth (7) on its upper surface, and an upper ring (5) positioned above the turntable for the workpiece.The workpiece is pressed against the polishing cloth. There is also a cleaning sector (30) in the second chamber (49) to clean the polished workpiece. There is also a device to transfer the workpiece from the polishing sector to the cleaning sector. Air can be supplied independently to the polishing and cleaning sectors.