Scanning electrochemical microscope for surface analysis and structurisation with high resolution
Apparatus for surface analysis and structurisation consists of a scanning electrochemical microscope containing an electrolyte. The novelty is that the electrolyte contains a substance (I) that reacts with at least one species (II) generated directly or indirectly at the ultramicroelectrode and to a...
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Format: | Patent |
Sprache: | eng ; ger |
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Zusammenfassung: | Apparatus for surface analysis and structurisation consists of a scanning electrochemical microscope containing an electrolyte. The novelty is that the electrolyte contains a substance (I) that reacts with at least one species (II) generated directly or indirectly at the ultramicroelectrode and to a lesser extent than the educts of the electrode reaction at this electrode. Also claimed are methods for producing microstructures by deposition of a material or by changing a substrate surface, especially by erosion. |
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