Scanning electrochemical microscope for surface analysis and structurisation with high resolution

Apparatus for surface analysis and structurisation consists of a scanning electrochemical microscope containing an electrolyte. The novelty is that the electrolyte contains a substance (I) that reacts with at least one species (II) generated directly or indirectly at the ultramicroelectrode and to a...

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Bibliographische Detailangaben
Hauptverfasser: HEINZE, JUERGEN, DR., 79102 FREIBURG, DE, BORGWARTH, KAI, 79100 FREIBURG, DE, RICKEN, CHRISTOPH, 79114 FREIBURG, DE, EBLING, DIRK., 79112 TIENGEN, DE
Format: Patent
Sprache:eng ; ger
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Zusammenfassung:Apparatus for surface analysis and structurisation consists of a scanning electrochemical microscope containing an electrolyte. The novelty is that the electrolyte contains a substance (I) that reacts with at least one species (II) generated directly or indirectly at the ultramicroelectrode and to a lesser extent than the educts of the electrode reaction at this electrode. Also claimed are methods for producing microstructures by deposition of a material or by changing a substrate surface, especially by erosion.