Doping semiconductor crystals, esp. silicon@ crystals

Doping semiconductor crystals comprises contacting a crystalline body, pretreated by ion implantation, with a medium contg. electrically active dopant or several dopants, treating at temp. below the recrystallisation temp., and then tempering for a short time at a sufficiently elevated temp. to recr...

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Bibliographische Detailangaben
Hauptverfasser:	BAUMANN, KURT., 14513 TELTOW, DE, JACOB, KERSTIN., 12524 BERLIN, DE, LEIHKAUF, RAINER., 10249 BERLIN, DE, MOHR, ULRICH, DR., 14532 KLEINMACHNOW, DE, BORN, KIRSTEN, 12683 BERLIN, DE
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	Doping semiconductor crystals comprises contacting a crystalline body, pretreated by ion implantation, with a medium contg. electrically active dopant or several dopants, treating at temp. below the recrystallisation temp., and then tempering for a short time at a sufficiently elevated temp. to recrystallise and electrically activated.