Silicon tetrafluoride

Silicon tetrafluoride

SiF4 is prepared by reacting SiO2, esp. quartz sand, with HF continuously in a turbulence or flowing bed reactor at 400-600 degrees C., and drawing off the resulting SiF4-water vapour mixture, cooling the mixture to 75-100 degrees C. whereby the water vapour partially condenses. The gaseous phase is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WILFRIED BECHER,DR, JOACHIM MASSONNE,DR
Format: Patent
Sprache:eng ; ger
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:SiF4 is prepared by reacting SiO2, esp. quartz sand, with HF continuously in a turbulence or flowing bed reactor at 400-600 degrees C., and drawing off the resulting SiF4-water vapour mixture, cooling the mixture to 75-100 degrees C. whereby the water vapour partially condenses. The gaseous phase is then purified and dried.