Bulkakustikwellenstruktur mit einer piezoelektrischen Aluminiumkupfernitrid-Schicht und darauf bezogenes Verfahren

Bulkakustikwellen(BAW)-Struktur (102), aufweisend:eine untere Elektrode (110), die über einem Substrat (104) gelegen ist;eine piezoelektrische Schicht (108), die über der unteren Elektrode (110) gelegen ist, wobei die piezoelektrische Schicht (108) Aluminiumkupfernitrid aufweist;eine obere Elektrode (112), die über der unteren Elektrode (110) gelegen ist. According to an exemplary embodiment, a bulk acoustic wave structure includes a lower electrode situated over a substrate. The bulk acoustic wave structure further includes a piezoelectric layer situated over the lower electrode, where the piezoelectric layer comprises aluminum copper nitride. The bulk acoustic wave structure further includes an upper electrode situated over the lower electrode. The bulk acoustic wave structure can further include a bond pad connected to the upper electrode, where the bond pad comprises aluminum copper. The lower electrode can include a high density metal situated adjacent to the piezoelectric layer and a high conductivity metal layer underlying the high density metal layer.