Clean room device for manufacturing or production process for chemical, pharmaceutical, biological, medical, electronics, micromechanics or optical applications with modelling of gas flow dependent on production system

The clean room device (1) has a work plate (4) provided with openings (6) and a gas feed (3) positioned above the work plate for directing a gas into the working zone (5) between the gas feed and the work plate, extracted via the openings in the latter. A device (9) is provided between the gas feed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROTH, KLAUS, SCHANZ, RAINER, FREDE, ANDREAS
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING BLASTING CLEANING CLEANING IN GENERAL HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL RANGES TRANSPORTING VENTILATING WEAPONS
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