UV-optische Fluoridkristallelemente zur Laserlithografie mit lambda<200nm und Verfahren derselben

This invention provides a method of detecting sub-ppm lead impurity levels in a below 200 nm transmitting optical calcium flouride crystal. The method includes providing a below 200 nm wavelength transmitting optical flouride crystal having a crystal light transmission path length, providing a 200-2...

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Bibliographische Detailangaben
Hauptverfasser:	MAYOLET, ALEXANDRE MICHEL, PELL, MICHAEL A, TIMOFEEV, NIKOLAY T
Format:	Patent
Sprache:	ger
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY CRYSTAL GROWTH INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	This invention provides a method of detecting sub-ppm lead impurity levels in a below 200 nm transmitting optical calcium flouride crystal. The method includes providing a below 200 nm wavelength transmitting optical flouride crystal having a crystal light transmission path length, providing a 200-210 nm spectrophotometer having a light source for producing a transmission test wavelength in the range 200 to 210 nm and a transmission detector for measuring transmission of the test wavelength, and transmitting the transmission test wavelength in the range of 200 to 210 nm through the below 200 nm wavelength transmitting optical flouride light transmission path length and measuring the transmission of the 200 to 210 nm test wavelength through the path length to provide a lead ppb impurity level measurement less than 500 ppb. The invention provides for improved manufacturing of below 200 nm wavelength optical elements and optical fluoride crystals such as ultralow lead contaminated calcium flouride.