Removal of metal-organic reagents under inert atmosphere from supply vessel involves using extraction valve and pump

The metal-organic reagent, which is under an inert atmosphere, is removed from the supply vessel through an extraction valve, using a pump A steel cylinder supply vessel is used. The inert gas atmosphere excess pressure is 20-40 mbar, and the inert gas is nitrogen. The pump is controlled by a flow meter. The extraction valve has an additional line through which solvent can be supplied for flushing the valve and connection. An Independent claim is included for a corresponding equipment for use in the above method. Die vorliegende Erfindung betrifft ein Verfahren zur Entnahme von metallorganischen Reagenzien aus einem Vorratsgefäß, das dadurch gekennzeichnet ist, dass das metallorganische Reagenz, das sich unter einer Inertgasatmosphäre befindet, mittels einer Pumpe über ein Entnahmeventil aus dem Vorratsgefäß entnommen wird.