Three-dimensional interferometric measuring method allows evaluation of depth information for interesting area of camera image selected via defined criteria

The interferometric measuring method scans the measured object (1.2) in the depth direction using the variation in the length of a light path in a reference arm (1.8) relative to the length of a light path in an object arm (1.7), the surface shape of the object determined using a camera (2) coupled...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BOHN, GUNTHER, HAPPOLD, WALTER
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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