Vorrichtung zum Analysieren und/oder Bearbeiten einer Probe mit einem Teilchenstrahl und Verfahren
An apparatus for analyzing and/or processing a sample with a particle beam, comprising:a providing unit for providing the particle beam;a shielding element for shielding an electric field (E) generated by charges (Q) accumulated on the sample, wherein the shielding element has a through opening for...
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| Format: | Patent |
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| Zusammenfassung: | An apparatus for analyzing and/or processing a sample with a particle beam, comprising:a providing unit for providing the particle beam;a shielding element for shielding an electric field (E) generated by charges (Q) accumulated on the sample, wherein the shielding element has a through opening for the particle beam to pass through towards the sample;a detecting unit configured to detect an actual position of the shielding element; andan adjusting unit for adjusting the shielding element from the actual position into a target position. |
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