Die-Kontaktstelle, Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung
The specification discloses a technique for preventing a bonding material from reaching the upper and lower surfaces of a semiconductor chip in bonding the semiconductor chip using the bonding material. A die pad of the technique disclosed in the specification includes the following: a die pad subst...
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Format: | Patent |
Sprache: | ger |
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Zusammenfassung: | The specification discloses a technique for preventing a bonding material from reaching the upper and lower surfaces of a semiconductor chip in bonding the semiconductor chip using the bonding material. A die pad of the technique disclosed in the specification includes the following: a die pad substrate; a first projection disposed on the upper surface of the die pad substrate, the first projection having a pedestal shape; a second projection disposed on the upper surface of the die pad substrate so as to surround at least part of the first projection in a plan view, the second projection having a bank shape; and a third projection disposed on the upper surface of the die pad substrate so as to surround at least part of the second projection in a plan view, the third projection having a bank shape. |
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