Production of electroconductive or semiconductive multilayer film used for manufacture of e.g. field effect transistor, involves coating precursor solution or dispersion containing organometallic compound(s) on substrate, and drying

Production of electroconductive or semiconductive multilayer film involves coating a metal oxide precursor solution or a dispersion containing organometallic compound(s) on a substrate, optionally drying, irradiating with ultraviolet and/ infrared radiation, optionally cooling, and repeating the abo...

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Hauptverfasser: BONRAD, KLAUS, KIRSCH, PEER, HAEMING, MARC, KLYSZCZ, ANDREAS, ISSANIN, ALEXANDER, WALKER, DANIEL
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Sprache:eng ; ger
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creator BONRAD, KLAUS
KIRSCH, PEER
HAEMING, MARC
KLYSZCZ, ANDREAS
ISSANIN, ALEXANDER
WALKER, DANIEL
description Production of electroconductive or semiconductive multilayer film involves coating a metal oxide precursor solution or a dispersion containing organometallic compound(s) on a substrate, optionally drying, irradiating with ultraviolet and/ infrared radiation, optionally cooling, and repeating the above process at least 2 times on the substrate. An independent claim is included for application of electroconductive or semiconductive multilayer film for manufacture of electronic components. Die Erfindung betrifft ein Verfahren zur Herstellung elektrisch halbleitender oder leitender Metalloxidschichten mit verbesserter Leitfähigkeit, die sich insbesondere für die Herstellung flexibler Dünnfilmtransistoren eignen, auf damit hergestellte Metalloxidschichten sowie deren Verwendung zur Herstellung elektronischer Bauteile.
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subjects APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
SEMICONDUCTOR DEVICES
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
title Production of electroconductive or semiconductive multilayer film used for manufacture of e.g. field effect transistor, involves coating precursor solution or dispersion containing organometallic compound(s) on substrate, and drying
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