Production of electroconductive or semiconductive multilayer film used for manufacture of e.g. field effect transistor, involves coating precursor solution or dispersion containing organometallic compound(s) on substrate, and drying

Production of electroconductive or semiconductive multilayer film involves coating a metal oxide precursor solution or a dispersion containing organometallic compound(s) on a substrate, optionally drying, irradiating with ultraviolet and/ infrared radiation, optionally cooling, and repeating the above process at least 2 times on the substrate. An independent claim is included for application of electroconductive or semiconductive multilayer film for manufacture of electronic components. Die Erfindung betrifft ein Verfahren zur Herstellung elektrisch halbleitender oder leitender Metalloxidschichten mit verbesserter Leitfähigkeit, die sich insbesondere für die Herstellung flexibler Dünnfilmtransistoren eignen, auf damit hergestellte Metalloxidschichten sowie deren Verwendung zur Herstellung elektronischer Bauteile.