Sensor device e.g. mass sensor device, for use in complementary metal-oxide-semiconductor readout circuit, has evaluation unit for detecting jump arising as result of anharmonicity in resonance of mechanical oscillation of oscillator

The device has a mechanical oscillator (12) arranged as a membrane to enclose an internal volume on an inner surface of the mechanical oscillator. An excitation unit (14) excites the mechanical oscillator to perform a mechanical oscillation in a non-linear range at varying excitation frequency. A digital evaluation unit i.e. CPU, detects a jump that arises as a result of anharmonicity in resonance of the mechanical oscillation of the mechanical oscillator. The mechanical oscillator comprises a movable electrode that is located opposite to a fixed electrode of the device. The fixed electrode is arranged as an implanted electrode. The movable electrode is made of polysilicon. The movable electrode is sealed with silicon nitride. Independent claims are also included for the following: (1) a method for operating a sensor device (2) a non-transitory computer readable medium comprising a set of instructions to perform a method for operating a sensor device. Eine Sensorvorrichtung mit einem mechanischen Schwinger, einem Anreger, der ausgebildet ist, um den mechanischen Schwinger in einem nicht-linearen Bereich zu einer mechanischen Schwingung mit einer variierenden Anregungsfrequenz anzuregen und eine Auswerteeinheit, die ausgebildet ist, um einen aufgr Resonanzschwingung der mechanischen Schwingung des mechanischen Schwingers zu detektieren.