Method for transporting substrates in substrate treating system, involves moving substrate in substrate treating system by transporting device, and tensioning empty strand of drawing unit during operation of driving unit

The method involves moving a substrate in a substrate treating system (1) by a transporting device (2) that is driven by a driving device (3) with a driving unit and a drawing unit (31). An empty strand of the drawing unit is tensioned during operation of the driving unit. A load end and a return st...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	JAEGER, REINHARD, BAUER, REINHARDT, LESMANN, STEFFEN, PUENSCH, THOMAS, KENNE, MARCO, HENTSCHEL, MICHAEL, WAYDBRINK, HUBERTUS VON DER
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The method involves moving a substrate in a substrate treating system (1) by a transporting device (2) that is driven by a driving device (3) with a driving unit and a drawing unit (31). An empty strand of the drawing unit is tensioned during operation of the driving unit. A load end and a return strand of the drawing unit are clamped simultaneously, and a spring is arranged to generate clamping force applied by a clamping unit on the drawing unit, where the drawing unit is a toothed belt or a chain. An independent claim is also included for a drive device for driving a transporting device.