Method for testing integrity of processed flat substrate e.g. glass plate, on processing table, involves optically detecting fractured product, where integrity of flat substrate is tested based on product that lies on processing table
The method involves optically detecting a fractured product, where integrity of a processed flat substrate (12) is tested based on the fractured product that lies on a processing table (10). An optical detection is made whether the fractured product is provided on the processing table before fitting...
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| Format: | Patent |
| Sprache: | eng ; ger |
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| Zusammenfassung: | The method involves optically detecting a fractured product, where integrity of a processed flat substrate (12) is tested based on the fractured product that lies on a processing table (10). An optical detection is made whether the fractured product is provided on the processing table before fitting the substrate on the processing table and/or after removing the substrate from the processing table. The integrity of substrate is tested using a light beam that is positioned by the processing table. The substrate is provided with a silicon layer and a photo-resist layer. An independent claim is also included for a device for testing integrity of a processed flat substrate on a processing table, comprising an optical testing device.
Bei einem Verfahren zum Prüfen der Unversehrtheit von zu bearbeitenden flächigen Substraten (12) auf einem Bearbeitungstisch (10) wird die Unversehrtheit optisch geprüft. Eine Vorrichtung zum Prüfen der Unversehrtheit von zu bearbeitenden flächigen Substraten (12) auf einem Bearbeitungstisch (10) weist entsprechend eine optische Prüfeinrichtung (24) zur optischen Prüfung der Unversehrtheit auf. |
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