Endblock für eine Magnetronanordnung mit einem rotierenden Target

To achieve an improved end block, in which heating by induction eddy currents, which may occur during AC sputtering, for example, is significantly reduced relative to known end blocks, an end block for a magnetron configuration having a rotating target comprises an end block housing having an attach...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SEYFERT, ULF, HEINRICH, HANS-JUERGEN, TESCHNER, GOETZ
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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