Substrate's temperature measuring method for vacuum deposition system, involves continuously calibrating pyrometers for determining temperature of substrate at different points on vacuum chamber

The method involves moving a substrate (13) via a vacuum chamber. Pyrometers (9-12) are continuously calibrated for determining temperatures of the substrate at different points on the chamber by comparing measured and estimated cooling values of the substrate at vacuum. The temperatures are measure...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAMMER, MANFRED, STEUER, CHRISTOPH, SENS, MARTIN, WENZEL, BERND-DIETER
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS RADIATION PYROMETRY TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!