Workpiece i.e. wafer, positioning device, has sensor supported on rotor of rotation unit, which forms fixed, anchored, stator fixed sensor rotation unit with rotary measuring system, and line-cross grid arranged opposite to sensor

The device has a drive (1) i.e. planar drive, with a planar motor plate (2) for alignment in an orthogonal XY-coordinate system. An incident light sensor unit (6) has a sensor (7), and a line-cross grid (8) for position determination is connected with the plate. The sensor is supported on a rotor of...

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Hauptverfasser:	MAAS, TORSTEN, KATZSCHMANN, MICHAEL, BORNMANN, VOLKER, SCHAEFFEL, CHRISTOPH
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS TRANSPORTING
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creator	MAAS, TORSTEN KATZSCHMANN, MICHAEL BORNMANN, VOLKER SCHAEFFEL, CHRISTOPH
description	The device has a drive (1) i.e. planar drive, with a planar motor plate (2) for alignment in an orthogonal XY-coordinate system. An incident light sensor unit (6) has a sensor (7), and a line-cross grid (8) for position determination is connected with the plate. The sensor is supported on a rotor of a rotation unit (3) e.g. roller bearing, which forms a fixed, anchored, stator fixed sensor rotation unit (10) with a rotary measuring system. The grid is arranged opposite to the sensor in a fixed distance. The system or the unit (3) has a control unit to determine and locate a rotation angle of the rotation unit. Die Erfindung betrifft eine Vorrichtung zur planaren Positionierung von Werkstücken, umfassend einen Antrieb mit einer Planarmotorplatte für eine Ausrichtung in einem orthogonalen XY-Koordinatensystem und eine Auflichtsensoreinheit mit einem Sensor und einem mit der Planarmotorplatte verbundenen Linien-Kreuzraster zur Positionsbestimmung. Erfindungsgemäß ist der Sensor auf einem Rotor einer Dreheinheit gelagert und es bildet die Dreheinheit eine raumfest verankerte statorgestellfeste Sensordreheinheit, wobei das Linien-Kreuzraster in einem festen Abstand gegenüber dem Sensor angeordnet ist.
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An incident light sensor unit (6) has a sensor (7), and a line-cross grid (8) for position determination is connected with the plate. The sensor is supported on a rotor of a rotation unit (3) e.g. roller bearing, which forms a fixed, anchored, stator fixed sensor rotation unit (10) with a rotary measuring system. The grid is arranged opposite to the sensor in a fixed distance. The system or the unit (3) has a control unit to determine and locate a rotation angle of the rotation unit. Die Erfindung betrifft eine Vorrichtung zur planaren Positionierung von Werkstücken, umfassend einen Antrieb mit einer Planarmotorplatte für eine Ausrichtung in einem orthogonalen XY-Koordinatensystem und eine Auflichtsensoreinheit mit einem Sensor und einem mit der Planarmotorplatte verbundenen Linien-Kreuzraster zur Positionsbestimmung. Erfindungsgemäß ist der Sensor auf einem Rotor einer Dreheinheit gelagert und es bildet die Dreheinheit eine raumfest verankerte statorgestellfeste Sensordreheinheit, wobei das Linien-Kreuzraster in einem festen Abstand gegenüber dem Sensor angeordnet ist.</description><language>eng ; ger</language><subject>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT ; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ; MACHINE TOOLS ; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; PERFORMING OPERATIONS ; TRANSPORTING</subject><creationdate>2009</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20091203&DB=EPODOC&CC=DE&NR=102008025138A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25566,76549</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20091203&DB=EPODOC&CC=DE&NR=102008025138A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MAAS, TORSTEN</creatorcontrib><creatorcontrib>KATZSCHMANN, MICHAEL</creatorcontrib><creatorcontrib>BORNMANN, VOLKER</creatorcontrib><creatorcontrib>SCHAEFFEL, CHRISTOPH</creatorcontrib><title>Workpiece i.e. wafer, positioning device, has sensor supported on rotor of rotation unit, which forms fixed, anchored, stator fixed sensor rotation unit with rotary measuring system, and line-cross grid arranged opposite to sensor</title><description>The device has a drive (1) i.e. planar drive, with a planar motor plate (2) for alignment in an orthogonal XY-coordinate system. 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Erfindungsgemäß ist der Sensor auf einem Rotor einer Dreheinheit gelagert und es bildet die Dreheinheit eine raumfest verankerte statorgestellfeste Sensordreheinheit, wobei das Linien-Kreuzraster in einem festen Abstand gegenüber dem Sensor angeordnet ist.</description><subject>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</subject><subject>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</subject><subject>MACHINE TOOLS</subject><subject>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>PERFORMING OPERATIONS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2009</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjrFOw0AQRN1QoMA_TEPnRHYipLQoBPEBSJTR6by2V8S3p90zJj_Md-CzQkFHNaPRzOjdFt_voh-RyRN4QxtMriUtEcU4sQQOHRr6ZE8lemcwCiYKG2MUTdRAAlTSHEmbjcsjjIFTialn36MVHQwtf1FTwgXfi2Znc3VeLfnv6589Jk79EukFAzkbNcPYxRIN-anBmQOtvYoZOuUGTtWFLkPFhZ-Q5Pp9V9y07mx0f9VV8fByfDu8rinKiSw6T4HS6flYV9uq2lfbx3q3f6p3_-39AL5RcQg</recordid><startdate>20091203</startdate><enddate>20091203</enddate><creator>MAAS, TORSTEN</creator><creator>KATZSCHMANN, MICHAEL</creator><creator>BORNMANN, VOLKER</creator><creator>SCHAEFFEL, CHRISTOPH</creator><scope>EVB</scope></search><sort><creationdate>20091203</creationdate><title>Workpiece i.e. wafer, positioning device, has sensor supported on rotor of rotation unit, which forms fixed, anchored, stator fixed sensor rotation unit with rotary measuring system, and line-cross grid arranged opposite to sensor</title><author>MAAS, TORSTEN ; KATZSCHMANN, MICHAEL ; BORNMANN, VOLKER ; SCHAEFFEL, CHRISTOPH</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_DE102008025138A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; ger</language><creationdate>2009</creationdate><topic>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</topic><topic>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</topic><topic>MACHINE TOOLS</topic><topic>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>PERFORMING OPERATIONS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>MAAS, TORSTEN</creatorcontrib><creatorcontrib>KATZSCHMANN, MICHAEL</creatorcontrib><creatorcontrib>BORNMANN, VOLKER</creatorcontrib><creatorcontrib>SCHAEFFEL, CHRISTOPH</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MAAS, TORSTEN</au><au>KATZSCHMANN, MICHAEL</au><au>BORNMANN, VOLKER</au><au>SCHAEFFEL, CHRISTOPH</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Workpiece i.e. wafer, positioning device, has sensor supported on rotor of rotation unit, which forms fixed, anchored, stator fixed sensor rotation unit with rotary measuring system, and line-cross grid arranged opposite to sensor</title><date>2009-12-03</date><risdate>2009</risdate><abstract>The device has a drive (1) i.e. planar drive, with a planar motor plate (2) for alignment in an orthogonal XY-coordinate system. An incident light sensor unit (6) has a sensor (7), and a line-cross grid (8) for position determination is connected with the plate. The sensor is supported on a rotor of a rotation unit (3) e.g. roller bearing, which forms a fixed, anchored, stator fixed sensor rotation unit (10) with a rotary measuring system. The grid is arranged opposite to the sensor in a fixed distance. The system or the unit (3) has a control unit to determine and locate a rotation angle of the rotation unit. Die Erfindung betrifft eine Vorrichtung zur planaren Positionierung von Werkstücken, umfassend einen Antrieb mit einer Planarmotorplatte für eine Ausrichtung in einem orthogonalen XY-Koordinatensystem und eine Auflichtsensoreinheit mit einem Sensor und einem mit der Planarmotorplatte verbundenen Linien-Kreuzraster zur Positionsbestimmung. Erfindungsgemäß ist der Sensor auf einem Rotor einer Dreheinheit gelagert und es bildet die Dreheinheit eine raumfest verankerte statorgestellfeste Sensordreheinheit, wobei das Linien-Kreuzraster in einem festen Abstand gegenüber dem Sensor angeordnet ist.</abstract><oa>free_for_read</oa></addata></record>
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subjects	COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS TRANSPORTING
title	Workpiece i.e. wafer, positioning device, has sensor supported on rotor of rotation unit, which forms fixed, anchored, stator fixed sensor rotation unit with rotary measuring system, and line-cross grid arranged opposite to sensor
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