Rotary rate sensor, has compensation electrode provided for partial compensation of levitation force acting on coriolis element parallel to deflection, where deflection of coriolis element is provided in detectable manner by detection unit

The sensor (1) has a substrate (2) with a main extension level and a coriolis element (3), where the coriolis element is provided to a vibration (5) parallel to an axis (X) by an excitation unit (4) in an excited manner. A deflection of the coriolis element is provided in a detectable manner by a de...

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Bibliographische Detailangaben

Hauptverfasser:	HAUER, JOERG, ROCZNIK, MARKO
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
Online-Zugang:	Volltext bestellen
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