Illumination optics for guiding a radiation bundle of a radiation source in microlithography comprises an optical bundle guiding component arranged between an emission volume and the object field

Illumination optics (7) comprises an optical bundle guiding component (13) arranged between an emission volume (4) and the object field which is moved about at least two degrees of freedom to scan the object field with the radiation bundle. Independent claims are also included for the following: (1)...

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Bibliographische Detailangaben
Hauptverfasser:	HAIDNER, HELMUT, SCHRIEVER, MARTIN
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	Illumination optics (7) comprises an optical bundle guiding component (13) arranged between an emission volume (4) and the object field which is moved about at least two degrees of freedom to scan the object field with the radiation bundle. Independent claims are also included for the following: (1) Production of a micro- or nano-structured component using the illumination optics; and (2) Micro- or nano-structured component produced by the above process. Preferred Features: The optical bundle guiding component is formed as an ellipsoid mirror and has exactly two translational degrees of freedom. Eine Beleuchtungsoptik (7) für die Mikrolithografie dient zur Führung eines Strahlungsbündels (3) einer Strahlungsquelle, die ein ausgedehntes Emissionsvolumen (4) aufweist, hin zu einem Objektfeld in einer Objektebene (6). Die Beleuchtungsoptik (7) hat genau eine optische Bündelführungskomponente (13), die zum Abrastern des Objektfeldes mit dem Strahlungsbündel (3) um mindestens zwei Bewegungs-Freiheitsgrade angetrieben beweglich ist. Es resultiert eine Beleuchtungsoptik, deren Anzahl bündelführender Komponenten minimiert ist.