Heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit and/or heating element arranged parallel to the surface of the heat storage unit

The heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit (1) and/or heating element (21, 22) arranged parallel to the surface of the heat storage unit. The interval of adjoining heating element in an edge area (12) of the surface is smaller than at the rest of the surface. The area-related heat output at an edge area of the surface is greater than at the rest of the surface. The interval of the adjoining heating element decreases with decreasing interval of the edge. The heating device for a vacuum plant, comprises a heat-radiating surface, and a heat storage unit (1) and/or heating element (21, 22) arranged parallel to the surface of the heat storage unit. The interval of adjoining heating element in an edge area (12) of the surface is smaller than at the rest of the surface. The area-related heat output at an edge area of the surface is greater than at the rest of the surface. The interval of the adjoining heating element decreases with decreasing interval of the edge. A first group of longitudinally stretched heating element is arranged parallel to the surface of the heat storage unit and is equipped to an additional longitudinally stretched heating element that is arranged parallel to the surface of the heat storage unit but not parallel to the heating element of the first group. The additional heating element is the part of two second group of longitudinally stretched heating elements that are arranged parallel to each other. Each second group is arranged to each end of the first group heating element. The interval between the two adjoining heating elements of the second group is differently large. The heating elements are rod shaped electric resistant heating element. The heat storage unit is a graphite plate. Es wird eine verbesserte Heizeinrichtung für eine Vakuumanlage beschrieben. Vakuumanlagen dienen der Behandlung von Substraten im Vakuum, beispielsweise zur Beschichtung der Substratoberfläche mit Beschichtungsmaterial in einem Beschichtungsverfahren oder/und zur Reinigung und Aktivierung der Substratoberfläche in einem Ätzverfahren. Die vorgeschlagene Heizeinrichtung mit einer Wärme abstrahlenden Oberfläche ist dadurch gekennzeichnet, dass die flächenbezogene Wärmeleistung an mindestens einem Randbereich der Oberfläche gegenüber dem Rest der Oberfläche erhöht ist.