Scanning unit for micromechanical scanning sensor, has functional part connected with base, and sensor head extending from end region of functional part and arranged in region of short side of rectangular cross section of functional part

The scanning unit (13) has a base (13a) for fastening the scanning unit to a sensor arm of a raster-force-microscope. A functional part (13b) is connected with the base, where the cross section of the part is rectangular, circular or elliptical. A sensor head (14) extends from an end region (13c) of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GRESCHNER, JOHANN, FRITZ, GEORG, KALT, SAMUEL, BAYER, THOMAS
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!