Device for scanning surface of semiconductor, comprises scanning device for scanning surface, which has lighting device that withdraws light rays and glass fiber element

The device comprises a scanning device for scanning the surface (12) of a semiconductor (16), which has a lighting device (14) that withdraws light rays (24). A glass fiber element is also provided between the lighting device and the surface. The glass fiber element extends along the expansion direction of the lighting device. The scanning device and the lighting device is movable and the glass fiber element is so arranged that the glass fiber angle is smaller than the lighting facility angles (alpha ). The glass fibers of the glass fiber element have numeric aperture between 0.2-0.3. An independent claim is also included for a method for the investigation of a surface of a semiconductor. Eine Vorrichtung zur Untersuchung einer Oberfläche (12) eines Halbleiters (16) weist eine Abtasteinrichtung (10) zum Abtasten der Oberfläche (12) mit einer Beleuchtungseinrichtung (14) auf. Aus der Beleuchtungseinrichtung treten Lichtstrahlen (24) unter einem Beleuchtungseinrichtungswinkel (alpha) aus. Zwischen der Beleuchtungseinrichtung (14) und der Oberfläche (12) ist ein Glasfaserelement (21) angeordnet.