Messzellenanordnung für einen Drucksensor mit Kraftmesselement aus Glas

The cell device has a membrane (18) and a strength measuring element (14), impinged with pressure for measuring a fluid. The measuring element is connected with a side facing away from pressure (22) of the membrane. The side bends during the membrane deflection. The strength measuring element has a...

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Bibliographische Detailangaben
Hauptverfasser:	SIBER, ARMIN, KOGER, KURT, ZEISEL, DIETER, STARK, DANIEL
Format:	Patent
Sprache:	ger
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The cell device has a membrane (18) and a strength measuring element (14), impinged with pressure for measuring a fluid. The measuring element is connected with a side facing away from pressure (22) of the membrane. The side bends during the membrane deflection. The strength measuring element has a glass substrate (15) and a resistance element (32), which is applied on the substrate and changes the resistance with the deflection of the substrate. A glass film (24) has a melting point below the melting point of the substrate and the membrane. Independent claims are also included for the following: (1) a pressure sensor with a measuring cell device (2) a method for producing a measuring cell device.