System zur Inspektion eines scheibenförmigen Objekts
A system ( 100, 200, 300 ) for inspecting a disc-shaped object is disclosed. The system ( 100, 200, 300 ) comprises a loading unit for disc-shaped objects 4 and a device 1 for simultaneously imaging the front side and back side of the disc-shaped object 4.
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Format: | Patent |
Sprache: | ger |
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Zusammenfassung: | A system ( 100, 200, 300 ) for inspecting a disc-shaped object is disclosed. The system ( 100, 200, 300 ) comprises a loading unit for disc-shaped objects 4 and a device 1 for simultaneously imaging the front side and back side of the disc-shaped object 4. |
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