Verfahren und Vorrichtung zum Herstellen eines mindestens eine gasförmige Komponente enthaltenden Gasgemisches, insbesondere eines Kalibriergases

In a process to prepare a calibration gas incorporating a trace element of given concentration, the matrix gas is supplied at a constant rate and the trace element gas is introduced. Introduction is by constant rate discharge as identical 30-50 microdroplets from a pulse-operated piezoelectric jet (4). The gas mixture is warmed to evaporate the microdroplets. The matrix gas is an ultra-pure gas especially synthetic air or nitrogen. The micro-droplets are transported away from the jet by gentle flow of matrix gas. One or more trace elements may be introduced in droplet form. Also claimed is a commensurate calibration gas generation assembly with a gas supply (1), trace gas reservoir (2), dosing unit (3), piezoelectric (16) jet (4) discharging to an evaporator tube (6). Operation of the piezoelectric jet is regulated by a digital control unit (S).