Micromechanical component has seismic mass sprung-mounted by double U spring to be deflectable by external acceleration, stop(s) protrusion for limiting deflection of double U spring

Micromechanical component has seismic mass sprung-mounted by double U spring to be deflectable by external acceleration, stop(s) protrusion for limiting deflection of double U spring

The component has a seismic mass (1) sprung-mounted by at least one double U spring (4) and able to be deflected in at least one direction by an external acceleration. At least one stop protrusion (N,N') is provided to limit the deflection of the double U spring. At least one stop protrusion is...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: RUMP, ARNOLD, PINTER, STEFAN, FISCHER, FRANK
Format: Patent
Sprache:eng ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GYROSCOPIC INSTRUMENTS
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NAVIGATION
PERFORMING OPERATIONS
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SEMICONDUCTOR DEVICES
SURVEYING
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:The component has a seismic mass (1) sprung-mounted by at least one double U spring (4) and able to be deflected in at least one direction by an external acceleration. At least one stop protrusion (N,N') is provided to limit the deflection of the double U spring. At least one stop protrusion is provided between the arms of the double U spring. Die Erfindung schafft ein mikromechanisches Bauelement, insbesondere einen Beschleunigungs- oder Drehratensensor, mit einer durch mindestens eine Doppel-U-Feder (4) federnd gelagerten seismischen Masseneinrichtung (1), welche durch eine externe Beschleunigung in mindestens eine Richtung auslenkbar ist. Mindestens ein Noppenanschlag (N; N') ist zur Begrenzung der Auslenkung der Doppel-U-Feder (4) vorgesehen.