Calibrating partial pressure of quadrupol mass spectrometers for very pure gases in ultra high vacuum comprises removing impurities from gas, regulating gas inlet, and synchronizing pressure rise

Calibrating the partial pressure of quadrupol mass spectrometers for very pure gases in an ultra high vacuum comprises feeding the gas to be calibrated through a liquid nitrogen trap to remove impurity components; regulating the gas inlet with a dosing valve and a corner valve of a turbo pump so tha...

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Bibliographische Detailangaben

Hauptverfasser:	HEIL, JUERGEN, LAUCK, ANDREAS, RAU, MATTHIAS, JAKOBY, WOLFGANG
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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