Miniature actuator of magnetic solenoid type formed on semiconductor substrate as integrated unit with electronic control system

On silicon substrate (Si) oxide layers are deposited on one of which are wound copper primary windings (Cu) and on other aluminum secondary windings (Al). Magnetic circuit is then formed by incorporation of magnetic micromechanical parts with the substrate or by spraying it with ferromagnetic materi...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KAIFLER, ERICH
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INDUCTANCES MAGNETS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES TRANSFORMERS
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