Applicator of plasma microwave generator and plasma microwave generator comprising such applicator
The microwave plasma generator is applied to transmission of electromagnetic field into plasma. The invention consists of the fact that the guiding part (3) has two outputs (4, 4′) between which an input (2) of microwave is placed generated from the microwave power source (5). The input (2) is in th...
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Format: | Patent |
Sprache: | cze ; eng |
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Zusammenfassung: | The microwave plasma generator is applied to transmission of electromagnetic field into plasma. The invention consists of the fact that the guiding part (3) has two outputs (4, 4′) between which an input (2) of microwave is placed generated from the microwave power source (5). The input (2) is in the distance (A) from the separation (10) of the first output (4) and in the distance (B) from the separation (10′) of the second output (4′) while the absolute value of the difference of the distances A-B or B-A equals λ/2 where λ is the wave length of the microwave and distances A and B correspond to the trajectory of microwave propagation. A microwave plasma generator including microwave power source (magnetron) (5) is connected to the input (2) of the guiding part (3) of the applicator (1). |
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